Hexamethyldisilazane
Properties
CAS: 999-97-3
EINECS: 213-668-5
Chemical formula: C6H19NSi2
Molecular Weight: 161.39
InChI=1/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
Density: 0.765
Melting point: -78℃
Boiling point: 125℃
Flash point: 20℃
Water solubility: REACTS
Vapor pressure: 20 hPa (20 °C)
Refractive index: 1.4069
Properties Colorless transparent liquid, non-toxic, slightly amine odor.
Hexamethyldisilazane is an organosilicon compound with the structural formula [(CH3)3Si]2N-Si(CH3)3, also known as TMEDA or TMDSN.It is a colorless liquid and is flammable at room temperature.
The properties of hexamethyldisilazane are as follows:
1. Solubility: Hexamethyldisilazane is soluble in common organic solvents such as ethanol, ether and alkanes.
2. Reactivity: Hexamethyldisilazane has nucleophilic substitution reactivity, and can be used as a nucleophilic reagent to participate in a variety of organic synthesis reactions, such as substitution, alkylation and nucleophilic addition reactions.
3. Stability: Hexamethyldisilazane can be stable under certain conditions, but under high temperature, high pressure or other reaction conditions, it may decompose and release gaseous silazane.
4. Acid-base: Hexamethyldisilazane is a basic compound, which can have acid-base neutralization reaction with acidic substances to produce salt and water.
5. Application: Hexamethyldisilazane is often used as a binding reagent in organic synthesis, and can form complexes with metal compounds for organometallic chemistry and catalytic reactions.
Uses
Hexamethyldisilazane (also known as HMDS) is a silicone compound with a wide range of applications. The following are some of the main uses of hexamethyldisilazane:
1. Chemical protectants: Hexamethyldisilazane is commonly used as a chemical protectant for sensitive chemical reagents or intermediates in certain laboratory and industrial applications. It can form an inorganic silicon nitrogen layer to protect chemicals from humidity, oxygen and impurities.
2. Surface treatment agents: Hexamethyldisilazane can be used to improve the wettability and adhesion properties of material surfaces. It can be used in the production of products such as coatings, adhesives, inks and plastics to improve their performance on different surfaces.
3. Semiconductor manufacturing: Hexamethyldisilazane is commonly used as a suspending agent or as a precursor for service state chemical vapor deposition (SACVD) in semiconductor manufacturing processes. It is capable of producing high purity silicone-nitrogen films for use in key components of semiconductor devices such as insulating, barrier and transmission layers.
4. Lithography Negative Coatings: Hexamethyldisilazane can also be used as a negative coating in lithography processes. It improves the smoothness, anti-reflectivity and anti-adhesion properties of the substrate, resulting in high-quality micrographic pattern preparation.
Safety Information
Hexamethyldisilazane is a colorless liquid commonly used as an organic synthesis and catalyst. The following is safety information about hexamethyldisilazane:
1. Toxicity: Hexamethyldisilazane has low toxicity to humans and the environment, but contact with the skin, eyes and respiratory tract should still be avoided.
2. INHALATION: Avoid inhalation of hexamethyldisilazane vapors or gases.
3. Ingestion: Avoid contact of hexamethyldisilazane with food or drinking water.
4. Skin contact: Hexamethyldisilazane may cause skin irritation and prolonged skin contact should be avoided. If skin contact occurs, rinse immediately with plenty of soap and water.
5. Environmental effects: Hexamethyldisilazane is not readily degradable in water and may cause harmful effects to aquatic organisms. Discharge of the substance into water bodies should be avoided.